Vacuum Rated Stepper Motors

Ordinary motors cannot operate for long at pressures lower than 10-4 Torr. Empire Magnetics vacuum rated motors are constructed to allow extended operation at pressures as low as 10-7 Torr without a sacrifice in motor performance.

Some vacuum applications cannot tolerate contamination by motor outgassing products. To accommodate a range of motor cleanness requirements, Empire Magnetics provides three grades of vacuum rated stepping motors in the full range of environmental motor sizes.

Laboratory Grade Vacuum Rated Stepper Motors - add model prefix VX

VX grade is our premium stepper motor product offering. It is typically used when even very small amounts of contamination are of concern to the customer. Some applications have been: space based optical systems, semiconductor manufacturing chambers and electron beam equipment.
The vacuum rating for these vacuum rated stepper motors is 10-7 Torr. The internal temperature rating is 180° C internal and 155° for the case. The bearing lubricant vapor pressure is below 10-9 Torr at 100° C. This stepper motor is cleaned and baked, and undergoes a proprietary extraction process to remove contaminants. It should be handled under clean room conditions with nylon gloves. Read More ...

Standard Grade Vacuum Rated Stepper Motors - add model prefix VS

VS grade is our "standard" vacuum rated stepper motor product offering. It is typically used when very clean is good enough including: vacuum chamber applications where the chamber will be opened frequently, the contamination from the outside air will normally exceed that of the VS vacuum rated stepper motor, clean room equipment up to class 10 rating, as well as sputtering & diffusion equipment.
These vacuum rated stepper motors have a vacuum rating of 10-7 Torr and temperature rating of 155° C internal and 130° for the case. The bearing lubricant vapor pressure is below 10-8 Torr at 100° C. This vacuum rated stepper motor is subjected to an industrial cleaning process, vacuum baked to encourage outgassing of residual contaminants and is sealed in a nylon bag. Read More ...

Commercial Grade Vacuum Products - add model prefix VC

The Commercial Grade vacuum rated stepper motor has a vacuum rating of 10-6 Torr. These stepper motors are temperature rated at 130° C internal, and 105° for the case. The bearing lubricant vapor pressure is below 10-6 Torr at 100° C. This vacuum rated stepper motor will give off a small quantity of vaporization products and no special handling is required. Read More ...